| 1 | Material Identification | The operator identifies the workpiece, its thickness, surface condition, and the required die or part dimensions before cutting begins. | Recipe or process-control interface | Material type, thickness, pattern layout, allowable kerf, and cut depth | A suitable cutting method and process recipe are selected for the material. |
| 2 | Workpiece Mounting | The wafer, panel, or substrate is attached to an adhesive dicing tape or another support system to hold the pieces during cutting. | Mounting frame, chuck, or vacuum table | Flatness, tape adhesion, surface cleanliness, and workpiece alignment | The workpiece remains stable without excessive warpage or movement. |
| 3 | Alignment and Pattern Recognition | An optical camera or alignment system locates reference marks, streets, edges, or programmed cutting coordinates. | Vision camera and motion-control system | Reference-mark visibility, coordinate accuracy, focus, and stage position | The cutting path is positioned relative to the workpiece pattern. |
| 4 | Cutting Tool Selection | The machine uses a suitable blade or laser configuration. Blade dicing commonly uses a thin, high-speed diamond blade with coolant. | Spindle, diamond blade, or laser head | Blade width, abrasive type, spindle speed, laser wavelength, and tool condition | The tool is appropriate for the substrate and the required cut quality. |
| 5 | Tool Conditioning | For blade dicing, the blade may be dressed or conditioned to expose fresh abrasive and maintain a consistent cutting surface. | Dressing board or conditioning station | Blade exposure, dressing frequency, spindle speed, and material removal rate | Stable cutting performance and a controlled kerf are established before production cuts. |
| 6 | Coolant or Process-Gas Setup | In blade dicing, water-based coolant removes heat and particles. In some laser processes, gas or other debris-control methods are used. | Coolant nozzle, filtration, pump, or gas-delivery system | Flow rate, cleanliness, temperature, pressure, and nozzle position | Heat, debris, and contamination are controlled during cutting. |
| 7 | First-Direction Cutting | The stage moves the mounted workpiece or cutting head along programmed parallel paths to create the first set of grooves. | Precision X-Y stage and spindle or laser head | Feed speed, cutting depth, tool runout, vibration, and path spacing | Straight, evenly spaced cuts are produced with limited chipping or thermal damage. |
| 8 | Second-Direction Cutting | The workpiece or cutting head changes orientation or coordinates and cuts the crossing paths needed to separate individual pieces. | Rotary axis, X-Y stage, and motion controller | Cross-axis alignment, pitch accuracy, depth, feed speed, and vibration | A complete grid or programmed pattern is formed. |
| 9 | Piece Separation | After the cuts reach the intended depth, the adhesive tape or support layer keeps the separated pieces organized for handling. | Dicing tape, frame, and optional expansion system | Cut-through depth, tape strength, expansion distance, and handling force | Individual parts are separated while remaining in their original layout or a controlled expanded layout. |
| 10 | Cleaning and Drying | Residue, coolant, and loose particles are removed using rinsing, brushing, air, or another approved cleaning process. | Cleaning nozzle, rinse system, air knife, or dryer | Water quality, pressure, drying temperature, and particle control | The diced parts are clean and dry enough for inspection or downstream assembly. |
| 11 | Visual and Dimensional Inspection | The machine or operator checks cut lines, edge quality, dimensions, missing cuts, chipping, cracks, contamination, and alignment. | Inspection camera, microscope, and measurement software | Magnification, lighting, measurement tolerance, and inspection sampling | Parts are accepted, reworked, or rejected according to defined quality limits. |
| 12 | Collection and Traceability | Accepted pieces are transferred for packaging or the next manufacturing operation, while process data may be recorded for traceability. | Pickup tool, carrier, cassette, or data-recording system | Handling force, part orientation, labeling, lot information, and yield data | Diced parts are protected, identified, and ready for the next process step. |