| Capacitive | A moisture-sensitive dielectric material changes the capacitance between two electrodes as the surrounding relative humidity changes. | 0–100% relative humidity (RH) | Approximately ±1.5–3% RH under controlled conditions | Typically a few seconds to several tens of seconds, depending on airflow, filter, and package design | Low power consumption, compact size, good repeatability, and easy integration with digital electronics | Accuracy can be affected by condensation, contamination, temperature, and long-term drift; calibration is usually required for precise work | HVAC systems, building monitoring, weather instruments, data loggers, appliances, and industrial controls |
| Resistive | The electrical resistance of a hygroscopic material varies as it absorbs or releases water vapor. | Typically 20–90% RH; some designs cover a wider range | Approximately ±3–5% RH in common applications | Usually seconds to minutes | Simple circuit design, low cost, small form factor, and suitability for basic humidity detection | More sensitive to temperature, chemical contamination, electrode aging, and nonlinear response than many capacitive devices | Consumer products, simple alarms, low-cost controllers, and general-purpose environmental monitoring |
| Thermal Conductivity | The sensor detects changes in the thermal conductivity of air caused by differences in water-vapor concentration. | Best suited to high humidity or water-vapor concentration measurement; usable over a broad range with suitable calibration | Often about ±2–5% RH equivalent, depending strongly on temperature, pressure, gas composition, and calibration | Fast, commonly less than a few seconds | Fast response, durable construction, and reduced sensitivity to some surface contaminants because there is no hygroscopic polymer layer | Requires temperature and pressure compensation; readings can be inaccurate when other gases are present or when gas composition changes | Industrial gas monitoring, drying systems, compressed-air equipment, and process-control environments |
| Chilled Mirror | A cooled mirror is controlled until condensation forms on its surface. The dew-point temperature is measured optically and used to calculate humidity. | Typically from very low dew points to near-saturation conditions, depending on the instrument | Often approximately ±0.1–0.2°C dew point in laboratory-grade instruments | Seconds to minutes, depending on temperature stability and operating conditions | High accuracy, excellent long-term stability, and a direct physical measurement of dew point | Higher cost, larger size, greater power consumption, and possible mirror contamination requiring cleaning | Calibration laboratories, pharmaceutical manufacturing, precision meteorology, and reference measurements |
| Psychrometric | Relative humidity is calculated from the temperature difference between a dry-bulb thermometer and a wetted wet-bulb thermometer. | Commonly about 5–95% RH, depending on airflow and instrument design | Approximately ±2–5% RH when properly ventilated and maintained | Usually tens of seconds to several minutes | Based on a well-established measurement method, suitable for field checks, and useful where electronic humidity sensors are unsuitable | Needs airflow, a clean wet wick, regular water maintenance, and accurate temperature measurement; performance decreases near saturation | HVAC commissioning, agricultural monitoring, laboratories, and reference checks |
| Optical or Spectroscopic | Water vapor absorbs specific wavelengths of light; the amount of absorption is used to determine vapor concentration or humidity. | Broad range, including very dry and high-temperature environments, depending on the optical system | Can be better than ±1% RH equivalent in specialized systems after calibration | Milliseconds to seconds in many designs | Fast, suitable for remote or non-contact measurement, and capable of operating in demanding industrial environments | More complex and expensive; optical alignment, particles, pressure, temperature, and gas composition may influence results | Industrial process monitoring, combustion research, environmental analysis, and specialized scientific instruments |